CIONE Series: Benchtop Plasma Systems

The CIONE family of plasma systems represents the most flexible and cost effective range of benchtop plasma processing units which can be used to perform a wide range of plasma processing tasks in the laboratory environment.


CIONE 4"

Dual Mode

  • Reactive Ion Etch (RIE)
  • Plasma Etching (PE)

Process Chamber

  • Inner Size: 140 x 200 x 110 mm (W x D x H)
  • Uniform Gas Flow Design (Patented)
  • Solid Aluminum Block (Minimized Leakage, Not Welded)

Generator

  • Frequency: 20~100kHz (LF)
  • Power: up to 100W

Gas Lines

  • Process gas lines: up to 3 x Channels
  • MFC Flow Rate: up to 100 sccm

Vacuum Package

  • Pirani Gauge: Atmospheric Pressure ~ 5 x 10-4 Torr 
  • Vacuum Pump - Oil Rotary Type, 200 L/min @ 60Hz, 
  • Ultimate Pressure: 10-3 Torr 

Controller

  • DSP on board signal controller, Manual/Automatic Operation




CIONE 6"

Dual Mode

  • Reactive Ion Etch (RIE)
  • Plasma Etching (PE)

Process Chamber

  • Inner Size: 200 x 220 x 160 mm (W x D x H)
  • Uniform Gas Flow Design (Patented)
  • Solid Aluminum Block (Minimized Leakage, Not Welded)

Generator

  • Frequency: 20~100kHz (LF) / 13.56MHz (RF)
  • Power: up to 200W (LF) / 300W or 600W(opt.) (RF)

Gas Lines

  • Process gas lines: up to 4 x Channels
  • MFC Flow Rate: up to 200 sccm
Vacuum Package
  • Pirani Gauge: Atmospheric Pressure ~ 5 x 10-4 Torr 
  • Vacuum Pump - Oil Rotary Type, 290 L/min @ 60Hz, 
  • Ultimate Pressure: 10-3 Torr 

Controller

  • DSP on board signal controller, Manual/Automatic Operation




CIONE 8"

Dual Mode

  • Reactive Ion Etch (RIE)
  • Plasma Etching (PE)

Process Chamber

  • Inner Size: 250 x 300 x 200 mm (W x D x H)
  • Uniform Gas Flow Design (Patented)
  • Solid Aluminum Block (Minimized Leakage, Not Welded)

Generator

  • Frequency: 20~100kHz (LF) / 13.56MHz (RF)
  • Power: up to 200W (LF) / 300W or 600W(opt.) (RF)

Gas Lines

  • Process gas lines: up to 4 x Channels
  • MFC Flow Rate: up to 500 sccm
Vacuum Package
  • Pirani Gauge: Atmospheric Pressure ~ 5 x 10-4 Torr 
  • Vacuum Pump - Oil Rotary Type, 290 L/min @ 60Hz, 
  • Ultimate Pressure: 10-3 Torr 

Controller

  • DSP on board signal controller, Manual/Automatic Operation